NINAU
ʻO Silicon Nitride Substrates no ka hoʻonui ʻana i ka hana uila uila
2023-03-08


Power Electronics


Hoʻokumu ʻia ka hapa nui o nā hoʻolālā module mana i kēia lā i nā seramika i hana ʻia me ka alumini oxide (Al2O3) a i ʻole AlN, akā ke piʻi aʻe nā koi o ka hana, ke nānā nei nā mea hoʻolālā i nā substrate ʻē aʻe. Ma nā noi EV, no ka laʻana, e iho ana nā poho o ka hoʻololi ʻana i ka 10% ke hele ka mahana o ka chip mai 150°C a i 200°C. Eia kekahi, ʻo nā ʻenehana hōkeo hou e like me nā modules solder-free a me nā modules wire-bond-free e hana i nā substrates i loaʻa i ka loulou nāwaliwali loa.


ʻO kekahi kumu koʻikoʻi ʻo ia ka pono o ka huahana e lōʻihi i nā kūlana paʻakikī, e like me nā mea i loaʻa i nā turbines makani. He ʻumikūmālima mau makahiki ka lōʻihi o ke ola ʻana o nā turbine makani ma lalo o nā kūlana kaiapuni āpau, e koi ana i nā mea hoʻolālā o kēia noi e ʻimi i nā ʻenehana substrate maikaʻi loa.


ʻO ka hoʻonui ʻana i ka hoʻohana ʻana i nā ʻāpana SiC ke kolu o ka mea e alakaʻi nei i nā mea hoʻohui substrate i hoʻonui ʻia. I ka hoʻohālikelike ʻana i nā modula maʻamau, ua hōʻike ʻia nā modula SiC mua me ka hoʻopili maikaʻi loa i ka emi ʻana o ka pohō o 40 a i ka 70 pakeneka, akā hōʻike pū kekahi i ka pono no nā ʻenehana hōʻano hou, me nā substrate Si3N4. ʻO kēia mau manaʻo āpau e kaupalena i ka hana o ka wā e hiki mai ana o nā substrate Al2O3 a me AlN, ʻoiai ʻo nā substrate e pili ana iā Si3N4 ka mea i koho ʻia no nā modula mana kiʻekiʻe e hiki mai ana.


Ua kūpono ʻo Silicon nitride (Si3N4) no nā substrate uila uila ma muli o kona ikaika kulou ʻoi aku, ʻoi aku ka paʻakikī haʻihaʻi kiʻekiʻe, a me ka conductivity thermal kiʻekiʻe. ʻO nā hiʻohiʻona o ka keramika a me ka hoʻohālikelike ʻana i nā ʻano koʻikoʻi, e like me ka hoʻokuʻu ʻana a i ʻole ka hoʻokumu ʻia ʻana o nā māwae, he hopena nui i ka ʻano substrate hope loa, e like me ke ʻano o ka wela a me ke ʻano holo kaʻa wela.


ʻO ka conductivity thermal, ka ikaika kulou, a me ka paʻakikī o ka haʻihaʻi ka mea nui loa i ke koho ʻana i nā mea insulating no nā modula mana. He mea nui ka conductivity thermal kiʻekiʻe no ka hemo wikiwiki ʻana o ka wela i loko o kahi module mana. He mea koʻikoʻi ka ikaika kulou no ke ʻano o ka mālama ʻana a me ka hoʻohana ʻana o ka substrate seramika i ka wā o ka hoʻopili ʻana, aʻo ka paʻakikī o ka haʻihaʻi he mea nui ia no ka ʻike ʻana i ka hilinaʻi.

 

ʻO ka haʻahaʻa haʻahaʻa haʻahaʻa haʻahaʻa a me nā waiwai mechanical haʻahaʻa ke ʻano o Al2O3 (96%). Eia nō naʻe, ua lawa ka conductivity thermal o 24 W/mK no ka hapa nui o nā noi ʻoihana maʻamau o kēia lā. ʻO ka hana wela wela kiʻekiʻe o AlN o 180 W/mK ka mea maikaʻi loa, ʻoiai kona hilinaʻi haʻahaʻa. ʻO kēia ka hopena o ka paʻakikī haʻahaʻa haʻahaʻa o Al2O3 a me ka ikaika kulou like.


ʻO ka piʻi nui ʻana o ka noi no ka hilinaʻi nui aʻe i alakaʻi i nā holomua hou i nā ceramics ZTA (zirconia toughened alumina). ʻOi aku ka ʻoi aku o kēia mau seramika i ka ikaika wili a me ka paʻakikī haʻihaʻi ma mua o nā mea ʻē aʻe. ʻO ka mea pōʻino, ua hoʻohālikelike ʻia ka conductivity thermal o ZTA ceramics me ka Al2O3 maʻamau; ʻO ka hopena, ua kaupalena ʻia kā lākou hoʻohana ʻana i nā noi mana kiʻekiʻe me ka nui o ka mana.


ʻOiai hoʻohui ʻo Si3N4 i ka conductivity thermal maikaʻi loa a me ka hana mechanical. Hiki ke kuhikuhi ʻia ka conductivity thermal ma 90 W/mK, a ʻo kona paʻakikī haʻihaʻi ka mea kiʻekiʻe loa ma waena o nā seramika i hoʻohālikelike ʻia. Hōʻike kēia mau hiʻohiʻona e hōʻike ʻo Si3N4 i ka hilinaʻi kiʻekiʻe loa ma ke ʻano he substrate metala.


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