Aluminium Nitride (AlN) e qalile ho etsoa ka 1877, empa ts'ebeliso ea eona e ka bang teng ho microelectronics ha ea ka ea susumetsa nts'etsopele ea thepa ea boleng bo holimo, e ka rekisoang ho fihlela bohareng ba bo-1980.
AIN ke mofuta oa aluminium nitrate. Aluminium nitride e fapane le aluminium nitrate ka hore ke motsoako oa naetrojene o nang le boemo bo itseng ba oxidation ea -3, ha nitrate e bua ka ester leha e le efe kapa letsoai la nitric acid. Sebopeho sa kristale ea thepa ena ke hexagonal wurtzite.
Khokahano ea AIN
AlN e hlahisoa ka phokotso ea carbothermal ea alumina kapa nitridation e tobileng ea aluminium. E na le boima ba 3.33 g/cm3 'me, leha e sa qhibilihe, e ikarola mochesong o ka holimo ho 2500 °C le khatello ea sepakapaka. Ntle le thuso ea li-additives tse etsang mokelikeli, thepa e tlamahane ka thata 'me e hanana le sintering. Ka tloaelo, li-oxide tse kang Y2O3 kapa CaO li lumella ho sintering mocheso o pakeng tsa 1600 le 1900 degrees Celsius.
Likarolo tse entsoeng ka aluminium nitride li ka etsoa ka mekhoa e fapaneng, ho kenyeletsoa khatiso e batang ea isostatic, ho bopa ente ea ceramic, ho bopa ente e nang le khatello e tlase, ho lahla theipi, ho sebetsa ka nepo le ho hatella ka mokhoa o omileng.
Likarolo tsa Bohlokoa
AlN ha e kenelle litšepe tse ngata tse qhibilihisitsoeng, ho kenyelletsa aluminium, lithium le koporo. Ha e kenelle ho bongata ba letsoai le qhibilihisitsoeng, ho kenyelletsa le chloride le cryolite.
Aluminium nitride e na le conductivity e phahameng ea mocheso (170 W/mk, 200 W/mk, le 230 W/mk) hammoho le ho hanyetsa molumo o phahameng le matla a dielectric.
E ka hlaseloa habonolo ke hydrolysis ka mokhoa oa phofo ha e pepesehetse metsi kapa mongobo. Ho feta moo, li-acids le alkalis li hlasela aluminium nitride.
Sesebelisoa sena ke insulator bakeng sa motlakase. Doping e ntlafatsa tsamaiso ea motlakase ea thepa. AIN e bonts'a thepa ea piezoelectric.
Lisebelisoa
Microelectronics
Tšobotsi e tsotehang ka ho fetisisa ea AlN ke conductivity ea eona e phahameng ea mocheso, e leng ea bobeli feela ho beryllium har'a lisebelisoa tsa ceramic. Ha mocheso o le ka tlase ho likhato tse 200 tsa Celsius, mocheso oa eona oa mocheso o feta oa koporo. Motsoako ona oa conductivity e phahameng, resistivity ea molumo, le matla a dielectric e nolofalletsa tšebeliso ea eona e le li-substrates le liphutheloana bakeng sa likopano tsa likaroloana tsa microelectronic tse matla kapa tse phahameng. Tlhokahalo ea ho senya mocheso o hlahisoang ke tahlehelo ea ohmic le ho boloka likarolo tse ka har'a mocheso oa mocheso oa ts'ebetso ke e 'ngoe ea lintlha tse fokotsang tse khethollang boima ba ho paka likarolo tsa elektronike. Li-substrates tsa AlN li fana ka pholiso e atlehang ho feta li-substrates tse tloaelehileng le tse ling tsa ceramic, ke ka lebaka leo li sebelisoang e le li-chip carriers le licheso tsa mocheso.
Aluminium nitride e fumana ts'ebeliso e atileng ea khoebo ho li-filters tsa RF bakeng sa lisebelisoa tsa puisano tsa mehala. Lera la aluminium nitride le teng pakeng tsa likarolo tse peli tsa tšepe. Lisebelisoa tse tloaelehileng lekaleng la khoebo li kenyelletsa ho kenya motlakase le likarolo tsa taolo ea mocheso ho li-lasers, li-chiplets, li-collets, li-insulators tsa motlakase, li-clamp rings tse lisebelisoa tsa ho lokisa semiconductor, le liphutheloana tsa sesebelisoa sa microwave.
Lisebelisoa tse ling
Ka lebaka la litšenyehelo tsa AlN, lits'ebetso tsa eona esale li lekanyelitsoe ho lifofane tsa sesole le libaka tsa lipalangoang. Leha ho le joalo, boitsebiso boo bo ithutoa haholo 'me bo sebelisoa likarolong tse fapaneng. Thepa ea eona e ntle e etsa hore e tšoanelehe bakeng sa lits'ebetso tse 'maloa tsa bohlokoa tsa indasteri.
Lisebelisoa tsa indasteri tsa AlN li kenyelletsa metsoako ea refractory bakeng sa ho sebetsana le lirafshoa tse matla tse qhibilihisitsoeng le litsamaiso tse sebetsang hantle tsa phapanyetsano ea mocheso.
Sesebelisoa sena se sebelisetsoa ho etsa li-crucibles bakeng sa kholo ea likristale tsa gallium arsenide hape li sebelisoa ho hlahisa tšepe le li-semiconductors.
Lisebelisoa tse ling tse reriloeng bakeng sa aluminium nitride li kenyelletsa joalo ka sensor ea lik'hemik'hale bakeng sa likhase tse chefo. Ho sebelisa li-nanotubes tsa AIN ho hlahisa li-nanotube tsa quasi-one-dimensional hore li sebelisoe lisebelisoa tsena e bile taba ea lipatlisiso. Lilemong tse mashome a mabeli tse fetileng, ho ’nile ha etsoa lipatlisiso ka li-diode tse ntšang khanya tse sebetsang mahlaseling a mahlaseli a kotsi. Tšebeliso ea filimi e tšesaane ea AIN ho li-sensor tsa maqhubu a maqhubu a holimo e hlahlobiloe.
