Ha lipotoloho tse kopantsoeng li fetohile indasteri ea naha ea maano, lisebelisoa tse ngata tsa semiconductor li 'nile tsa etsoa lipatlisiso le ho ntlafatsoa,' me ha ho pelaelo hore Aluminium Nitride ke e 'ngoe ea lisebelisoa tse tšepisang ka ho fetisisa tsa semiconductor.
Litšobotsi tsa Ts'ebetso ea Aluminium Nitride
Aluminium Nitride (AlN) e na le litšoaneleho tsa matla a phahameng, ho hanyetsa molumo o phahameng, matla a phahameng a ho thibela mocheso, coefficient ea ho atolosoa ha mocheso, ho lumellana hantle le silicon, joalo-joalo Ha e sebelisoe feela e le thuso ea sintering kapa mohato oa ho matlafatsa bakeng sa lirafshoa tsa mohaho empa hape e sebelisoa. lebaleng la li-substrates tsa elektroniki tsa ceramic le lisebelisoa tsa ho paka, tse ntseng li eketseha lilemong tsa morao tjena, mme ts'ebetso ea eona e feta hole ea Alumina. Li-ceramics tsa Aluminium Nitride li na le ts'ebetso e ntle ka kakaretso, li loketse li-substrates tsa semiconductor le lisebelisoa tsa ho paka tsa sebopeho, 'me li na le bokhoni ba ts'ebeliso ea bohlokoa indastering ea lisebelisoa tsa elektroniki.
Tšebeliso ea Aluminium Nitride
1. Mesebetsi ea lisebelisoa tsa piezoelectric
Aluminium Nitride e na le resistivity e phahameng, conductivity e phahameng ea mocheso, le coefficient e fokolang ea katoloso e tšoanang le silicon, e leng thepa e loketseng bakeng sa lisebelisoa tsa elektronike tse nang le mocheso o phahameng le o matla.
2. Lisebelisuoa tsa ho paka tsa elektroniki
Beryllium Oxide, Alumina, Silicon Nitride, le Aluminium Nitride ke tse ling tsa lisebelisoa tse sebelisoang haholo bakeng sa li-substrates tsa ceramic.
Har'a lisebelisoa tsa ceramic tse teng tse ka sebelisoang e le lisebelisoa tsa substrate, li-ceramics tsa Silicon Nitride li na le matla a phahameng ka ho fetisisa a feto-fetohang, ho hanyetsa ho apara hantle, le thepa e ntle ka ho fetisisa ea mochine oa thepa ea ceramic, athe coefficient ea bona ea ho atolosa mocheso ke e nyenyane ka ho fetisisa. Li-ceramics tsa Aluminium Nitride li na le conductivity e phahameng ea mocheso, ho hanyetsa mocheso o motle, 'me li ntse li e-na le thepa e ntle ea mochine mocheso o phahameng. Ho ka boleloa hore, ho ea ka pono ea ts'ebetso, Aluminium Nitride le Silicon Nitride hona joale ke tsona tse loketseng ka ho fetisisa bakeng sa ho sebelisoa e le lisebelisoa tsa substrate tsa elektronike, empa li boetse li na le bothata bo tloaelehileng: theko ea bona e phahame.
3. Kopo ea lisebelisoa tse ntšang leseli
Mabapi le katleho ea phetoho ea photoelectric, aluminium nitride (AlN) e na le bandgap e tobileng ea semiconductor band bophara ba 6.2 eV, e leng holimo ho feta semiconductor ea indirect bandgap. AlN, e le thepa ea bohlokoa e ntšang khanya e putsoa le ea ultraviolet, e sebelisoa ho li-ultraviolet le li-radiode tse tebileng tsa mahlaseli a kotsi, li-ultraviolet laser diode, lisebelisoa tsa mahlaseli a kotsi, joalo-joalo. tharollo, 'me lekhalo la sehlopha sa motsoako oa eona oa ternary kapa quaternary le ka fetoloa ka mokhoa o tsoelang pele ho tloha sehlopheng se bonahalang ho ea ho sehlopha se tebileng sa ultraviolet, ho etsa hore e be ntho ea bohlokoa e hlahisang khanya e phahameng.
4. Kopo ea lisebelisoa tsa substrate
AlN crystal ke eona substrate e loketseng bakeng sa lisebelisoa tsa GaN, AlGaN, le AlN epitaxial. Ha ho bapisoa le li-sapphire kapa SiC substrates, AlN le GaN li na le ho lumellana hantle ha mocheso le lik'hemik'hale, 'me khatello ea kelello pakeng tsa substrate le epitaxial layer e nyenyane. Ka hona, likristale tsa AlN e le li-substrates tsa GaN epitaxial li ka fokotsa haholo ts'oaetso ea sekoli ho sesebelisoa le ho ntlafatsa ts'ebetso ea eona, e nang le tebello e ntle haholo ea ho sebelisoa ha ho lokisoa lisebelisoa tsa elektronike tse nang le mocheso o phahameng, oa maqhubu le matla a phahameng. Ho phaella moo, ho sebelisa likristale tsa AlN e le AlGaN epitaxial material substrate e nang le lisebelisoa tse phahameng tsa aluminium (Al) ho ka boela ha fokotsa ka katleho sekoli se nang le bokooa ba nitride epitaxial layer le ho ntlafatsa haholo tshebetso le bophelo bohle ba lisebelisoa tsa nitride semiconductor. Ho ipapisitsoe le AlGaN, sesebelisoa sa boleng bo holimo sa bofofu sa letsatsi se sebelisitsoe ka katleho.
5. Kopo ho li-ceramics le thepa ea refractory
Aluminium Nitride e ka sebelisoa molemong oa sintering ea ceramic; Li-ceramics tse lokiselitsoeng tsa Aluminium Nitride ha li na lisebelisoa tse ntle feela tsa mochini le matla a feto-fetohang ho feta li-ceramics tsa Al2O3 le BeO, empa hape le boima bo phahameng le ho hanyetsa kutu. Ho sebelisa mocheso le khoholeho ea mobu ea li-ceramics tsa AlN, li ka sebelisoa ho etsa li-crucibles, lijana tsa Al evaporation, le dikarolo tse ding tse phahameng tsa mocheso tse thibelang kutu. Ntle le moo, li-ceramics tse hloekileng tsa AlN bakeng sa likristale tse bonaletsang tse se nang 'mala, tse nang le thepa e ntle haholo ea optical, li ka sebelisoa e le lirafshoa tse pepeneneng bakeng sa lisebelisoa tsa elektroniki tsa optical le lisebelisoa bakeng sa lifensetere tse nang le mocheso o phahameng oa mocheso le mohatla o thibelang mocheso.