Ingalo ye-Alumina Ceramic ye-99.8% ye-Alumina Couramic iyingxenye esetshenziswa ezinqubweni zokukhiqiza ze-semiconductor. I-Alumina Ceramic uhlobo lwento yobumbano yokufakwa kukagesi okuhle kakhulu kanye nezakhiwo eziphakeme ezishisayo ze-thermal, okwenza kufanelekile kwizicelo ezahlukahlukene ze-semiconductor.
Ingalo ye-ceramic ivame ukuqashwa emishini yokukhiqiza ye-semiconductor efana namarobhothi okuphatha kanye nemishini yokukhetha kanye nezindawo. Ibambe futhi isebenze ngama-semiconductor we-wefers ngesikhathi sokukhiqiza.
Imvelo ehlanzekile nenothuli-engenalo uthuli iyadingeka ezinqubweni ezibalulekile ze-semiconductor kanye nezingxenye ezizoqashwa ku-vacuum, amazinga okushisa aphezulu, kanye nezimo ezilimazayo zegesi.
Amafutha e-Wafer enziwe ngo-99.8% alumina abekwe ku- "End angemuva" noma asebenzisa amarobhothi asebenzisa ukuhambisa ama-silicon wafers ukungena ngaphakathi nangaphandle kwama-cassette. I-95% kuya ku-99.9% i-aluminium oxide isetshenziswa njengezinto zokukhiqiza eziyinhloko zalokho okubizwa ngokuthi yi-cemera ye-semiconductor. Indlela yokudluliswa kwe-wafer idinga ukusetshenziswa kwezingalo ze-alumina ceramic ceramic mechanical, lapho kusebenza khona ukucubungula nezinto ezibonakalayo.
I-wafer kudivayisi ye-CMP ibekwa ngokucophelela epulatifomu ngaphansi kwekhanda lokupholisha ngemuva kokususwa ebhokisini le-wafer ngodonga lwamarobhothi. Imvamisa, ikhanda lokupholisha lisebenza njengethuluzi le-adcuum adsorption. I-wafer i-adsorbed ngokuqinile ekhanda lokuphola ngokusebenzisa i-vacuum adsorption, okubangela ikhanda lokupholisha ukuba lihlehlise phansi lapho kufakwa ngaphansi kwalo. Lapho nje i-wafer iboshwe, inhloko yokupholisha iletha ku-polishing pad ukuqala inqubo yokupholisa.
Ukusingathwa kwe-wafer kuvame ukwenzeka endaweni ye-vacuum ukuvikela ukungcoliswa, futhi ingalo yokuphatha kufanele ibe nzima kakhulu, igqoke ngokuvimbela, nokuvimbela izinga lokushisa. Izimfanelo ezibonakalayo zika-Alumina Ceramic ukuthi zikhulu, zilukhuni kakhulu, futhi zimelana kakhulu nokugqoka. Izinto ezinhle kakhulu ze-semiconductor imishini yezingalo mechanical armis ane-enomuzwa omuhle wokushisa, amandla amahle kakhulu emishini, ukufakwa okunamandla, ukumelana kahle nokugqwala, nezinye izimfanelo zomzimba ngisho nasezindaweni eziphakeme kakhulu.
Izici eziphambili ze-99.8% Alumina ingalo
I-Alumina iyi-ceramic eqinile kakhulu yezobuchwepheshe enobuhlakani obuhlukile bokugqoka.
Ubuhlobo obufanelekile obungenaphutha kulula ukufezekisa ngobukhulu obuphezulu bokuqonda nokuqinisa ukubekezelelana.
Ukwazi ukubekezelela amazinga okushisa aphezulu ngo-1650 ° C ekunciphiseni nasezindaweni ezinamandla
I-Alumina iyi-ceramic eqinile kakhulu yezobuchwepheshe enobuhlakani obuhlukile bokugqoka.
Ukumelana nokugqwala kwamakhemikhali kumazinga okushisa aphezulu, ukuqina kwamakhemikhali, ukumelana nobuningi bama-acid aqinile nama-alkalies, hhayi ukugqwala
Ukufakelwa kukagesi: Ukuwohloka kokufakelwa ku-18 KV okungenani.
Izindawo eziphakeme noma izindawo zokuvikela ezifundeni eziphakeme zisetshenziselwa ukuqeda ukungcola nokungcola.
Uma kuqhathaniswa namanye ama-ceramics, inezindleko eziphansi zezinto ezibonakalayo zezicelo ezisezingeni eliphakeme.
Ukuphetha, abakhiqizi be-semiconductor banganciphisa ubungozi bomonakalo noma ukungcoliswa ngesikhathi sokukhiqiza ngokusebenzisa izingalo ze-alumina ceramic ukuhlinzeka nge-semice semiconductor weafers.