UMBUZO
I-Silicon Nitride Substrates Yokusebenza Okuthuthukisiwe Kwe-Electronics Yamandla
2023-03-08


Power Electronics


Imiklamo eminingi yamamojula wamandla namuhla isekelwe kuma-ceramics enziwe nge-aluminium oxide (Al2O3) noma i-AlN, kodwa njengoba izidingo zokusebenza zikhuphuka, abaklami babheka kwamanye ama-substrates. Ezinhlelweni ze-EV, isibonelo, ukushintsha ukulahlekelwa kwehla ngo-10% uma izinga lokushisa le-chip lisuka ku-150°C liye ku-200°C. Ukwengeza, ubuchwepheshe obusha bokupakisha obufana namamojula angenawo umthengisi namamojula angenazintambo ezingenantambo enza ama-substrates akhona abe isixhumanisi esibuthakathaka.


Esinye isici esibalulekile ukuthi umkhiqizo udinga ukuhlala isikhathi eside ezimeni ezinzima, njengalezo ezitholakala kuma-wind turbines. Isikhathi sokuphila esilinganiselwe sezinjini zomoya ngaphansi kwazo zonke izimo zemvelo iminyaka eyishumi nanhlanu, okwenza abaklami balolu hlelo lokusebenza bafune ubuchwepheshe obuphezulu be-substrate.


Ukwenyuka kokusetshenziswa kwezingxenye ze-SiC kuyisici sesithathu esiqhuba ezinye izindlela ezithuthukisiwe ze-substrate. Uma kuqhathaniswa namamojula avamile, amamojula e-SiC okuqala ane-packaging efanelekile abonise ukuncipha kokulahlekelwa ngamaphesenti angu-40 kuya kwangu-70, kodwa futhi abonisa isidingo samasu okupakisha amasha, kuhlanganise nama-substrates e-Si3N4. Konke lokhu kuthambekela kuzokhawulela umsebenzi wesikhathi esizayo wama-substrates endabuko e-Al2O3 kanye ne-AlN, kanti ama-substrates asekelwe ku-Si3N4 azoba izinto ezikhethwayo zamamojula azayo asebenza kahle kakhulu.


I-Silicon nitride (i-Si3N4) ifaneleka kahle kuma-substrates kagesi kagesi ngenxa yamandla ayo okugoba aphakeme, ukuqina kokuphuka okuphezulu, kanye nokushisa okuphezulu kokushisa. Izici ze-ceramic kanye nokuqhathaniswa kwezinto eziguquguqukayo ezibalulekile, njengokukhipha ingxenye noma ukwakheka kokuqhekeka, kunomthelela omkhulu ekuziphatheni kokugcina kwe-substrate, njengokushintshwa kokushisa nokuziphatha okushisayo kwamabhayisikili.


I-Thermal conductivity, amandla okugoba, nokuqina kokuphuka yizici ezibaluleke kakhulu lapho kukhethwa izinto zokuvikela amamojula amandla. I-conductivity ephezulu ye-thermal ibalulekile ekuqothulweni okusheshayo kokushisa kumojula yamandla. Amandla okugoba abalulekile ukuthi i-substrate ye-ceramic iphathwa kanjani futhi isetshenziswe ngesikhathi senqubo yokupakisha, kuyilapho ukuqina kwe-fracture kubalulekile ekutholeni ukuthi kuzoba nokwethenjelwa kangakanani.

 

I-conductivity ephansi yokushisa kanye namanani aphansi emishini abonisa i-Al2O3 (96%). Nokho, i-thermal conductivity engu-24 W/mK yanele iningi lezinhlelo zokusebenza ezijwayelekile zezimboni zanamuhla. Ukushisa okuphezulu kwe-AlN okungu-180 W/mK kuyinzuzo yayo enkulu, naphezu kokwethembeka kwayo okumaphakathi. Lona umphumela wokuqina kokuphuka okuphansi kwe-Al2O3 namandla okugoba aqathaniswayo.


Isidingo esikhulayo sokwethenjelwa okukhulu siholele entuthukweni yakamuva ye-ZTA (zirconia toughened alumina) ceramics. Lawa ma-ceramics anamandla amakhulu okugoba kanye nokuqina kokuphuka kunezinye izinto. Ngeshwa, i-thermal conductivity ye-ceramics ye-ZTA iqhathaniswa naleyo ye-Al2O3 evamile; ngenxa yalokho, ukusetshenziswa kwazo ezinhlelweni zamandla aphezulu ezinomthamo omkhulu wamandla kukhawulelwe.


Ngenkathi i-Si3N4 ihlanganisa ukusebenza kahle kwe-thermal nokusebenza komshini. I-thermal conductivity ingacaciswa ku-90 W/mK, futhi ukuqina kwayo kokuphuka kuphakeme kakhulu phakathi kwezitsha zobumba eziqhathanisiwe. Lezi zici ziphakamisa ukuthi i-Si3N4 izokhombisa ukwethembeka okuphezulu kakhulu njenge-metalized substrate.


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