Pyrolytic Boron Nitride PBN Zvigadzirwa
Pyrolytic Boron Nitride (PBN) inogadzirwa neinozivikanwa yeChemical Vapor Deposition (CVD) maitiro umo ammonia gasi (NH3) uye gaseous boron halide senge boron trichloride (BCI3) inoita muchoto chepamusoro cheCVD kuisa. PBN pane yakakodzera substrate yakadai sePyrolytic Graphite.
PBN inozivikanwa seyakanakisa sarudzo yehuni-tembiricha uye zvinhu zvemagetsi, semiconductor, uye microwave compound makristasi akadai segermanium(Ge), gallium arsenide(GaAs), uye indium phosphate(InP) nekuda kwekuchena kwayo kwemukati. , uye physicochemical kugadzikana. PBN inogona kumira pa1800 ° C muvacuum uye 2000 ° C munitrogen, ichiisa iyo sechisarudzo chakanaka chezvikamu zvevira uye midziyo inonyunguduka.
VGF crucible imhando yemidziyo yekubatanidza makristasi ane vertical gradient freeze (VGF) maitiro, akadai seGaAs, InP, CZGaP, uye Ge crystal.
Chimiro chine hexagonal crystal lattice
Special zvivakwa perpendicular kune basal ndege yekristaro
Superior chimiro uye physicochemical kugadzikana
Anisotropic chimiro
Kugadzikana kwepamusoro kwekushisa
Kusanyorova
Kwete-chepfu
Crucibles yekukura kwe semiconductor makristasi
Wave machubhu eRF uye microwave
Windows iri pasi peiyo microwave radiation
Magetsi insulator
PBN ine yakasarudzika zvivakwa uye yakakwirira kurongeka uye physicochemical kugadzikana inogona kuve sarudzo yakanakisa se:
PBN crucibles yeVertical Gradient Freezing (VGF) maitiro
PBN crucibles yeLiquid Encapsulation Czochralski (LEC) maitiro
PBN midziyo yeMolecular Beam Epitaxy (MBE) maitiro
PBN zvikepe zvekomboni semiconductors uye alloy kugadzirisa
PBN Metal-Organic CVD (MOCVD) mabhodhi ekudzivirira uye MBE zvindori zvekudzivirira
PBN magetsi ekudzivirira mabhushi emhando yepamusoro-yekupisa vacuum midziyo
PBN yekufamba wave chubhu (TWT) ine spiral chimiro
Analytical Element | Mhedzisiro(μg/g) | Analytical Element | Mhedzisiro(μg/g) |
Li | <0.005 | Si | 1.7 |
F | <0.005 | CI | <0.005 |
Na | <0.005 | S | <0.005 |
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