KUBVUNZA
Silicon Nitride Substrates Yekuwedzeredzwa Simba Emagetsi Kuita
2023-03-08


Power Electronics


Mazhinji emagetsi module madhizaini nhasi akavakirwa pamakeramiki akagadzirwa nealuminium oxide (Al2O3) kana AlN, asi sezvo zvinodiwa zvekuita zvinokwira, vagadziri vari kutarisa mune mamwe ma substrates. Mumashandisirwo eEV, semuenzaniso, kurasikirwa kwekuchinja kunodzika negumi muzana kana tembiricha yechip ichikwira kubva pa150°C kuenda pa200°C. Pamusoro pezvo, matekinoroji matsva ekurongedza akadai solder-free modules uye waya-bond-yemahara modules inoita iyo iripo substrates iyo isina simba link.


Chimwe chinhu chakakosha ndechekuti chigadzirwa chinoda kugara kwenguva yakareba mumamiriro ezvinhu akaoma, seaya anowanikwa mumhepo turbines. Hupenyu hunofungidzirwa hwema turbines emhepo pasi pemamiriro ese ezvakatipoteredza makore gumi nemashanu, zvichiita kuti vagadziri veichi application vatsvage epamusoro substrate matekinoroji.


Kuwedzera kushandiswa kwezvinhu zveSiC chinhu chechitatu chiri kutyaira yakagadziridzwa substrate dzimwe nzira. Mukuenzanisa nemamodules akajairwa, ekutanga maSiC modules ane optimal packaging airatidza kurasikirwa kwe40 kusvika 70 muzana, asi yakaratidzawo kudiwa kwehunyanzvi hwekurongedza, kusanganisira Si3N4 substrates. Ese aya maitiro anozodzikamisa basa remangwana rechinyakare Al2O3 neAlN substrates, nepo substrates yakavakirwa paSi3N4 ichave chinhu chesarudzo kune remangwana repamusoro-performance power modules.


Silicon nitride (Si3N4) yakanyatsokodzera simba remagetsi substrates nekuda kwesimba rayo rekukotama repamusoro, kusimba kwekutsemuka kwepamusoro, uye kukwira kwekushisa kwekushisa. Zvimiro zveceramic uye kuenzanisa kwezvakasiyana-siyana, zvakadai sekubuda zvishoma kana kuumbwa kwekuputika, zvine simba guru pamaitiro ekupedzisira e substrate, zvakadai sekupisa kwekushisa uye maitiro ekupisa bhasikoro.


Thermal conductivity, kubhenda simba, uye kutyoka kusimba ndizvo zvakanyanya kukosha zvivakwa pakusarudza insulating zvinhu zvemagetsi module. High thermal conductivity inokosha kuti kukurumidza kupera kwekupisa mumagetsi emagetsi. Simba rekukotama rakakosha pamabatirwo anoitwa uye kushandiswa kweceramic substrate panguva yekurongedza, nepo kuomarara kwekupwanyika kwakakosha pakuona kuti ichavimbika sei.

 

Low thermal conductivity uye low mechanical values ​​inoratidza Al2O3 (96%). Nekudaro, iyo yekupisa conductivity ye24 W/mK inokwana kune yakawanda yeyakajairwa maindasitiri mashandisirwo emazuva ano. AlN's high thermal conductivity ye180 W/mK ndiyo mukana wayo mukuru, zvisinei nekuvimbika kwayo kuri pakati nepakati. Iyi ndiyo mhedzisiro yeAl2O3's low fracture kuomarara uye inofananidzwa yekukotama simba.


Kuwedzera kuri kuda kwekuvimbika kwakakonzera kufambira mberi munguva pfupi yapfuura muZTA (zirconia toughened alumina) ceramics. Aya maceramics ane simba rakakura rekukotama uye kusimba kwekutsemuka kupfuura zvimwe zvinhu. Nehurombo, iyo yekupisa conductivity yeZTA ceramics inofananidzwa neyeyakajairwa Al2O3; nekuda kweizvozvo, kushandiswa kwavo mumashandisirwo emagetsi epamusoro ane simba repamusoro-soro rinorambidzwa.


Nepo Si3N4 inosanganisa yakanakisa yekupisa conductivity uye kuita kwemuchina. Iyo yekupisa conductivity inogona kutsanangurwa pa90 W/mK, uye kuomarara kwayo kwekutsemuka ndiko kwepamusoro pakati peakaenzaniswa ceramics. Aya maitiro anoratidza kuti Si3N4 icharatidza kuvimbika kwakanyanya sesimbi ine simbi substrate.


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