(B4C Fousing Ring Produced by Wintrustek)

Boran carbide (B₄C) is regarded as an exceptionally hard and wear-resistant technical ceramic material due to its characteristics. Because of this, it's perfect for handling very hard materials, whether they're sintered to act as a blasting nozzle or are in powder or paste form and used as an abrasive or lapping agent. Products made of boron carbide have a very long service life, little wear, and affordable prices. Additionally, new military equipment uses lightweight composite constructions made of boron carbide for ballistic protection. This versatile substance is also used as a filler, for example, to boost a material's resistance to wear in metals or plastics, as high-temperature semiconductors, or as absorbers of neutrons in nuclear reactors.

Boron carbide ceramics with semiconductor capabilities and strong thermal conductivity can be employed as high-temperature semiconductor components, as well as gas distribution disks, focusing rings, microwave or infrared windows, and DC plugs in the semiconductor sector. When paired with C, B4C can be utilized as a radiation-resistant thermoelectric element and as a high-temperature thermocouple element with a service temperature of up to 2300°C.

B4C Focusing Ring

Commodities utilized in the etching step of wafer manufacture are focus rings. It keeps the wafer stationary so that the plasma density is maintained and shields the wafer's sidewalls from contamination.

In the past, focus rings were made of silicon and quartz. However, the need for silicon carbide (SiC) focus rings expanded along with the usage of dry etching over wet etching for advanced wafer fabrications.

B4C is resistant to plasma and high temperatures, just like SiC. Because B4C is tougher, they can be utilized for longer periods of time per unit.

Main features(B4C Focusing ring)

• Extremely high hardness

• Conductor of electricity

• Excellent wear resistance in plasma

• High specific stiffness