Feem ntau cov qauv tsim hluav taws xob niaj hnub no yog ua los ntawm cov ceramics ua los ntawm txhuas oxide (Al2O3) lossis AlN, tab sis raws li kev ua tau zoo nce, cov neeg tsim qauv tab tom nrhiav rau lwm cov substrates. Hauv cov ntawv thov EV, piv txwv li, kev hloov pauv poob mus rau 10% thaum lub nti kub mus ntawm 150 ° C mus rau 200 ° C. Tsis tas li ntawd, cov txheej txheem ntim khoom tshiab xws li cov khoom siv tsis pub dawb thiab cov khoom siv tsis muaj hlau tsis muaj hlau ua rau cov substrates uas twb muaj lawm qhov txuas tsis muaj zog.
Lwm qhov tseem ceeb tshaj plaws yog tias cov khoom yuav tsum tau nyob ntev dua hauv cov xwm txheej hnyav, zoo li cov uas pom hauv cua turbines. Kev kwv yees lub neej ntawm cua turbines nyob rau hauv tag nrho ib puag ncig ib puag ncig yog kaum tsib xyoos, ua rau cov neeg tsim qauv ntawm daim ntawv thov no nrhiav cov thev naus laus zis zoo tshaj plaws.
Kev siv ntau dua ntawm SiC Cheebtsam yog qhov thib peb uas ua rau muaj kev txhim kho substrate. Nyob rau hauv kev sib piv rau cov pa modules, thawj SiC modules nrog kev pom zoo ntim tau pom qhov poob ntawm 40 mus rau 70 feem pua, tab sis kuj tau pom qhov tsim nyog rau cov txheej txheem ntim tshiab, suav nrog Si3N4 substrates. Tag nrho cov kev xav no yuav txwv qhov kev ua haujlwm yav tom ntej ntawm cov tsoos Al2O3 thiab AlN substrates, whereas substrates raws li Si3N4 yuav yog cov khoom xaiv rau yav tom ntej kev ua haujlwm siab zog modules.
Silicon nitride (Si3N4) yog qhov zoo rau cov hluav taws xob hluav taws xob substrates vim nws lub zog khoov zoo dua, siab tawg toughness, thiab siab thermal conductivity. Cov yam ntxwv ntawm cov ceramic thiab kev sib piv ntawm qhov tseem ceeb, xws li kev tso tawm ib nrab los yog tawg, muaj kev cuam tshuam loj rau kev coj tus cwj pwm zaum kawg, xws li thermal conductivity thiab thermal cycling cwj pwm.
Thermal conductivity, dabtsi yog khoov lub zog, thiab tawg toughness yog cov khoom tseem ceeb tshaj plaws thaum xaiv cov ntaub ntawv insulating rau lub zog modules. High thermal conductivity yog qhov tseem ceeb rau kev tawg sai ntawm cov cua sov hauv lub zog hluav taws xob. Lub zog dabtsi yog khoov yog ib qho tseem ceeb rau yuav ua li cas cov ceramic substrate raug tuav thiab siv thaum lub sij hawm ntim txheej txheem, thaum lub pob txha toughness yog ib qho tseem ceeb rau kev txheeb xyuas seb nws yuav txhim khu kev qha.
Tsawg thermal conductivity thiab tsis tshua muaj neeg kho tshuab tus yam ntxwv Al2O3 (96%). Txawm li cas los xij, cov thermal conductivity ntawm 24 W / mK yog qhov tsim nyog rau feem ntau ntawm cov qauv kev lag luam niaj hnub no. AlN lub siab thermal conductivity ntawm 180 W / mK yog nws qhov zoo tshaj plaws, txawm tias nws muaj kev ntseeg siab. Qhov no yog qhov tshwm sim ntawm Al2O3 qhov tsis tshua muaj pob txha toughness thiab sib piv bending zog.
Qhov kev thov nce ntxiv rau kev cia siab ntau dua ua rau kev nce qib tsis ntev los no hauv ZTA (zirconia toughened alumina) ceramics. Cov ceramics no muaj zog dabtsi yog khoov ntau dua thiab tawg toughness dua lwm cov ntaub ntawv. Hmoov tsis zoo, cov thermal conductivity ntawm ZTA ceramics yog piv rau cov qauv Al2O3; Yog li ntawd, lawv siv nyob rau hauv high-power daim ntaub ntawv nrog lub siab tshaj plaws zog densities yog txwv.
Thaum Si3N4 ua ke zoo heev thermal conductivity thiab mechanical kev ua tau zoo. Cov thermal conductivity tuaj yeem teev tau ntawm 90 W / mK, thiab nws cov tawv nqaij tawg yog qhov siab tshaj plaws ntawm cov khoom sib piv. Cov yam ntxwv no qhia tias Si3N4 yuav nthuav tawm qhov kev ntseeg siab tshaj plaws raws li cov hlau substrate.
