(99.8% Alumina Wafer Loader Arm Produced by Wintrustek)
A 99.8% alumina ceramic loader arm is a component used in semiconductor manufacturing processes. Alumina ceramic is a type of ceramic material with excellent electrical insulation and high thermal conductivity properties, making it suitable for various semiconductor applications.
The ceramic arm is commonly employed in semiconductor production equipment such as wafer handling robots and pick-and-place machines. It holds and manipulates semiconductor wafers during the production process.
A clean and dust-free environment is necessary for semiconductor devices' crucial processes as well as the parts that must be employed in vacuum, high temperatures, and corrosive gas environments.
Wafer loaders made of 99.8% alumina are mounted on "end effectors" or wafer handing robots and are used to move silicon wafers into and out of process chambers and cassettes. 95% to 99.9% aluminum oxide is used as the primary production material for what is also referred to as semiconductor ceramics. The wafer transfer method necessitates the use of high-purity alumina ceramic mechanical arms, for which precise processing and material requirements are paramount.
The wafer in the CMP device is carefully placed on the platform beneath the polishing head after being removed from the wafer box by the robot wall. Usually, the polishing head serves as a vacuum adsorption device. The wafer is firmly adsorbed on the polishing head through vacuum adsorption, which causes the polishing head to slide downward when the wafer is placed underneath it. Once the wafer is fastened, the polishing head brings it to the polishing pad to begin the polishing process.
Wafer handling often takes place in a vacuum environment to prevent contamination, and the handling arm must be extremely hard, wear-resistant, and temperature-resistant. The physical qualities of alumina ceramic are that it is thick, highly hard, and highly resistant to wear. An excellent material for semiconductor equipment mechanical arms is one that has good heat resistance, excellent mechanical strength, strong insulation, good corrosion resistance, and other physical qualities even in high-temperature environments.
The main features of 99.8% Alumina Arm
Alumina is a very strong technical ceramic that has exceptional wear resistance.
A flawless fitting relationship is easy to achieve with high precision dimensions and tightening tolerance.
Able to tolerate temperatures as high as 1650°C in reducing and oxidizing environments
Alumina is a very strong technical ceramic that has exceptional wear resistance.
Resistance to chemical corrosion at high temperatures,chemical inertness, resistance to the majority of strong acids and alkalies, and not rust
Electrical insulation: The insulation breakdown is at least 18 kV.
High vacuums or protective environments at high temperatures are used to get rid of contaminants and impurities.
Compared to other ceramics, it has a low material cost for high-level applications.
To conclude, semiconductor producers can minimize the risk of damage or contamination during manufacturing by using alumina ceramic arms to provide precise and dependable handling of fragile semiconductor wafers.
